Equipment

Digitally Processed DC Sputtering (DPDS) developments (supported by Plus-Watch & Shincron)

     

DPDS system for Lab. (prototype)              Programable RAS (P-RAS® β)

Demonstration of DPDS of CuAlO2, P-RAS® β

Si/SiO2 Vertical DBR with Er-Y silicate active layer prepared by P-RAS® β
(P-RAS® has been registered by Shincron)

      Programmable RAS (P-RAS®) Powered by SHINCRON Co. Ltd.

 
RAS for Lab. α (Video)                     DPDS system  "Programmable RAS α"

Microwave Plasma(MP) CVD systems (for Diamond growth)　      

Pulsed-Laser Deposition (PLD for Layered  metal oxide compounds)

UV&EB Lithography systems (SVBL Clean room)

ICP-RIE (NE-500:ULVAC) (SVBL Clean room)

Ion Implantation (200kV: Nisshin HighVol.) (SVBL Clean room)

MP-Chemical Vapor Synthesis (for Fluoresent Nano-crystal diamond (NCD))    (Under development supported by Strawb)

PL measurement systems (Conventional, Gated-Photon-Counting, Micro- & HBT)

Waveguide measurement setup

   
(Visualization of Guided IR-light by up-conversion)

TEOS-RF-PCVD (Handmade for SiOx thin film)

and.. Our Brains & Skill