Equipment
Pulsed-Laser Deposition (PLD for Layered metal oxide compounds)
Digitally Processed DC Sputtering (DPDS) developments (supported by Plus-Watch & Shincron)
RAS for Lab. α (Video) DPDS system "Programmable RAS α"
Programmable RAS (P-RAS) Powered by SHINCRON Co. Ltd.
Demonstration of Digitally Processed DC Sputtering (DPDS), P-RAS β
Si/SiO2 Vertical DBR with Er-Y silicate active layer prepared by P-RAS β
(P-RAS® has been registered by Shincron)
Microwave Plasma(MP) CVD systems (for Diamond growth)
UV&EB Lithography systems (SVBL Clean room)
ICP-RIE (NE-500:ULVAC) (SVBL Clean room)
Ion Implantation (200kV: Nisshin HighVol.) (SVBL Clean room)
MP-Chemical Vapor Synthesis (for Fluoresent Nano-crystal diamond (NCD)) (Under development supported by Strawb)
PL measurement systems (Conventional, Gated-Photon-Counting, Micro- & HBT)
Waveguide measurement setup
(Visualization of Guided IR-light by up-conversion)
TEOS-RF-PCVD (Handmade for SiOx thin film)
and.. Our Brains & Skill