{"id":28,"date":"2017-04-02T18:54:00","date_gmt":"2017-04-02T09:54:00","guid":{"rendered":"http:\/\/www.flex.es.uec.ac.jp\/?page_id=28"},"modified":"2024-04-01T15:41:50","modified_gmt":"2024-04-01T06:41:50","slug":"research","status":"publish","type":"page","link":"https:\/\/www.flex.es.uec.ac.jp\/?page_id=28","title":{"rendered":"Research subjects"},"content":{"rendered":"<p>Research on Hybrid &amp; Heterogeneous Integration<\/p>\n<ol>\n<li>\u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9 (Silicon Photonics)\n<ul>\n<li>\u5e0c\u571f\u985e\u8907\u5408\u9178\u5316\u7269\u7d50\u6676\u8584\u819c\u306e\u5149\u6a5f\u80fd\u767a\u73fe\u30fb\u96c6\u7a4d\u30d7\u30ed\u30bb\u30b9\u958b\u767a<\/li>\n<li>\u65b0\u4e16\u4ee3\u96c6\u7a4d\u5316\u5149\u5236\u5fa1\u30b7\u30b9\u30c6\u30e0\u306e\u958b\u62d3<\/li>\n<li>\u96c6\u7a4d\u91cf\u5b50\u5149\u5b66\u7cfb\u306e\u69cb\u7bc9<\/li>\n<li>\u65b0\u3057\u3044<span style=\"display: inline !important; float: none; background-color: transparent; color: #222222; cursor: text; font-family: 'Open Sans',Verdana,Geneva,'DejaVu Sans',sans-serif; font-size: 16px; font-style: normal; font-variant: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-decoration: none; text-indent: 0px; text-transform: none; -webkit-text-stroke-width: 0px; white-space: normal; word-spacing: 0px;\">\u91d1\u5c5e<\/span>\u8907\u5408\u9178\u5316\u819c\u6210\u819c\u88c5\u7f6e(RASforLab.)\u306e\u958b\u767a(\u5171\u540c\u7814\u7a76\u3000<a href=\"https:\/\/www.shincron.co.jp\/en\/\">\u30b7\u30f3\u30af\u30ed\u30f3<\/a>\uff09<\/li>\n<\/ul>\n<\/li>\n<li>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u9ad8\u51fa\u529b\/\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u00a0\u30c7\u30d0\u30a4\u30b9\u306b\u5411\u3051\u305f\u7d50\u6676\u6210\u9577\u6280\u8853\u306e\u958b\u767a\n<ul>\n<li>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u5358\u7d50\u6676\u8584\u819c\u306e\u30d8\u30c6\u30ed\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577<\/li>\n<li>\u30ca\u30ce\u7d50\u6676\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u30d1\u30a6\u30c0\u30fc\u306e\u6c17\u76f8\u5408\u6210\u3068\u5fdc\u7528<\/li>\n<li>\u30b9\u30de\u30fc\u30c8\u30b0\u30ea\u30c3\u30c9\u3092\u76ee\u6307\u3059Si-\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u878d\u5408\u6280\u8853\u306e\u958b\u767a<\/li>\n<li>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\/\u30b7\u30ea\u30b3\u30f3\u30fb\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30d5\u30a9\u30c8\u30cb\u30af\u30b9<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n<div><!--more--><\/div>\n<div>Topics<\/div>\n<ul>\n<li><a href=\"https:\/\/iopscience.iop.org\/article\/10.35848\/1347-4065\/ad2aa5\">\u200bGrowth of CuAlO2 on SiO2 under a layer-by-layer approach conducted by digitally processed DC sputtering and its transistor characteristics\u200b<\/a> Open access(JJAP 2024)<\/li>\n<li><a class=\"bluelink-style customTooltip\" title=\"\u53cd\u5fdc\u6027\u30ac\u30b9\u30d1\u30eb\u30b9\u3068\u540c\u671f\u3057\u305f\u30c7\u30b8\u30bf\u30eb\u51e6\u7406DC\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\" href=\"https:\/\/www.jstage.jst.go.jp\/article\/vss\/66\/8\/66_20181115\/_article\/-char\/ja\">\u53cd\u5fdc\u6027\u30ac\u30b9\u30d1\u30eb\u30b9\u3068\u540c\u671f\u3057\u305f\u30c7\u30b8\u30bf\u30eb\u51e6\u7406DC\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0<\/a>, \u300c\u8868\u9762\u3068\u771f\u7a7a\u300d2023 \u5e74\u00a0 8 \u53f7<\/li>\n<li><a href=\"https:\/\/doi.org\/10.1116\/6.0001917\">Atomically Precise Deposition of (Er<sub>0.1<\/sub>Y<sub>0.9<\/sub>)<sub>2<\/sub>SiO<sub>5<\/sub> Combined with Digitally Processed DC Sputtering and Non-Radical Oxidation (JVSTA 40, 2022)<\/a> Open access (Sep.1, 2022)<\/li>\n<li><a href=\"https:\/\/doi.org\/10.35848\/1347-4065\/ac2b7c\">Highly precise multi-cathode pulsed-DC sputtering employing digital processing -application to layer-by-layer synthesis of cubic (Er0.1Y0.9)2Zr2O7 thin film-<\/a>(JJAP (2021))<\/li>\n<li class=\"title\"><a href=\"https:\/\/aip.scitation.org\/doi\/10.1063\/5.0065975\">Development of digitally processed DC reactive sputtering and its application to the synthesis of (Er<sub>0.1<\/sub>Y<sub>0.9<\/sub>)<sub>2<\/sub>SiO<sub>5<\/sub> layered crystalline thin film (JAP 130, 185301(2021))<\/a> Open access<\/li>\n<li><a href=\"https:\/\/www.shincron.co.jp\/product\/model\/p-ras\/\">\u682a)\u30b7\u30f3\u30af\u30ed\u30f3\u3088\u308a\u30c7\u30b8\u30bf\u30eb\u51e6\u7406\u3092\u5c0e\u5165\u3057\u305fProgrammable RAS(P-RAS)\u3092\u30ea\u30ea\u30fc\u30b9\uff08Oct., 2020\uff09<\/a><\/li>\n<li><a href=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2020\/07\/Abstract.pdf\">Proposal of Digitally Processed DC Sputtering by Programmable RAS(AVS 66 Oct.20-25, 2019)<\/a><div style=\"width: 625px;\" class=\"wp-video\"><video class=\"wp-video-shortcode\" id=\"video-28-1\" width=\"625\" height=\"352\" preload=\"metadata\" controls=\"controls\"><source type=\"video\/mp4\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2019\/10\/DSC0737.mp4?_=1\" \/><a href=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2019\/10\/DSC0737.mp4\">https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2019\/10\/DSC0737.mp4<\/a><\/video><\/div>\n<p>Demonstration of Digitally Processed DC Sputtering in Programable RAS (P-RAS)<\/li>\n<li><span style=\"display: inline !important; float: none; background-color: #ffffff; color: #191e23; cursor: text; font-family: 'Noto Serif JP'; font-size: 16px; font-style: normal; font-variant: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-decoration: none; text-indent: 0px; text-transform: none; -webkit-text-stroke-width: 0px; white-space: normal; word-spacing: 0px;\"><a href=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2019\/10\/ssdm2019.pdf\">Optical gain in (ErY)2Zr2O7 waveguide for backend photonics prepared by RAS<\/a> <\/span>\u00a0 (SSDM2019_Abstract)<\/li>\n<li><a href=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2020\/11\/labintro2020.pdf\">2020\u5352\u7814\u914d\u5c5e\u7528\u7814\u7a76\u5ba4\u7d39\u4ecb<\/a><\/li>\n<li><a href=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2019\/07\/PICS1.pdf\">1st PICS Workshop: Evolution of Photonic Integration<\/a>(June 21, 2019)<\/li>\n<li><a href=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2019\/05\/SSDM2018_Abstract.pdf\">Low Threshold and Extreme High Optical Gain in ErxYbyY2-x-ySiO5 Compound Crystalline Thin Films<\/a>(SSDM2018_Abstract)<\/li>\n<li><a href=\"https:\/\/www.osapublishing.org\/prj\/abstract.cfm?uri=prj-2-3-A45\">Rare earth silicates as gain media for silicon photonics <\/a>(Photonics Research 2, A45(2014))(Invited paper : Free Article)<\/li>\n<\/ul>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-349\" style=\"font-size: 1rem;\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/pcwg-300x257.png\" alt=\"\" width=\"264\" height=\"226\" srcset=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/pcwg-300x257.png 300w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/pcwg.png 552w\" sizes=\"auto, (max-width: 264px) 100vw, 264px\" \/><\/p>\n<p>Si photonic crystal slot ErxY2-xSiO5 waveguide<\/p>\n<ul>\n<li><span class=\"st\"><a href=\"http:\/\/iopscience.iop.org\/article\/10.7567\/JJAP.52.082601\/meta\">Role of Energy Migration in Nonradiative Relaxation Processes in ErxY2-xSiO5 Crystalline Thin Films<\/a>.(JJAP 52, 082601 (2013))<\/span><\/li>\n<li><a href=\"http:\/\/iopscience.iop.org\/article\/10.1143\/JJAP.51.090108\/meta\">Enhancement of Diamond Nucleation by Atomic Silicon Microaddition <\/a>(JJAP 51, 090108 (2012))(Selected paper : Free Article)<\/li>\n<\/ul>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-365\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/diamondR-300x227.jpeg\" alt=\"\" width=\"261\" height=\"198\" srcset=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/diamondR-300x227.jpeg 300w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/diamondR-768x580.jpeg 768w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/diamondR.jpeg 883w\" sizes=\"auto, (max-width: 261px) 100vw, 261px\" \/>\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 <img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-360\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/diamond1-300x287.png\" alt=\"\" width=\"203\" height=\"194\" srcset=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/diamond1-300x287.png 300w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/diamond1.png 351w\" sizes=\"auto, (max-width: 203px) 100vw, 203px\" \/><\/p>\n<p>Diamond cube grown on Si sub.\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 Diamond micro mosaic growth<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Research on Hybrid &amp; Heterogeneous Integration \u30b7\u30ea\u30b3\u30f3\u30d5\u30a9\u30c8\u30cb\u30af\u30b9 (Silicon Photonics) \u5e0c\u571f\u985e\u8907\u5408\u9178\u5316\u7269\u7d50\u6676\u8584\u819c\u306e\u5149\u6a5f\u80fd\u767a\u73fe\u30fb\u96c6\u7a4d\u30d7\u30ed\u30bb\u30b9\u958b\u767a  <a href=\"https:\/\/www.flex.es.uec.ac.jp\/?page_id=28\" class=\"more-link\">...<span class=\"screen-reader-text\"> \"Research subjects\"<\/span> \u3092\u7d9a\u3051\u3066\u8aad\u3080<\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":2,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-28","page","type-page","status-publish","h-entry","hentry","h-as-page"],"_links":{"self":[{"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=\/wp\/v2\/pages\/28","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=28"}],"version-history":[{"count":55,"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=\/wp\/v2\/pages\/28\/revisions"}],"predecessor-version":[{"id":1620,"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=\/wp\/v2\/pages\/28\/revisions\/1620"}],"wp:attachment":[{"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=28"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}