{"id":243,"date":"2017-04-13T14:13:30","date_gmt":"2017-04-13T05:13:30","guid":{"rendered":"http:\/\/www.flex.es.uec.ac.jp\/?page_id=243"},"modified":"2024-04-25T17:46:25","modified_gmt":"2024-04-25T08:46:25","slug":"facilities","status":"publish","type":"page","link":"https:\/\/www.flex.es.uec.ac.jp\/?page_id=243","title":{"rendered":"Equipment"},"content":{"rendered":"<h2><strong>Equipment<\/strong><\/h2>\n<p><strong>Digitally Processed DC Sputtering (DPDS) developments<\/strong><span style=\"display: inline !important; float: none; background-color: #ffffff; color: #191e23; cursor: text; font-family: 'Noto Serif JP'; font-size: 16px; font-style: normal; font-variant: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-decoration: none; text-indent: 0px; text-transform: none; -webkit-text-stroke-width: 0px; white-space: normal; word-spacing: 0px;\"> (supported by Plus-Watch &amp; Shincron)<\/span><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\" wp-image-1628 alignnone\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/DSC_0092-300x225.jpg\" alt=\"\" width=\"299\" height=\"224\" srcset=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/DSC_0092-300x225.jpg 300w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/DSC_0092-1024x768.jpg 1024w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/DSC_0092-768x576.jpg 768w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/DSC_0092-1536x1152.jpg 1536w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/DSC_0092-2048x1536.jpg 2048w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/DSC_0092-960x720.jpg 960w\" sizes=\"auto, (max-width: 299px) 100vw, 299px\" \/>\u00a0 \u00a0 \u00a0<img loading=\"lazy\" decoding=\"async\" class=\" wp-image-1627 alignnone\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/DSC_0094-300x225.jpg\" alt=\"\" width=\"299\" height=\"224\" srcset=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/DSC_0094-300x225.jpg 300w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/DSC_0094-1024x768.jpg 1024w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/DSC_0094-768x576.jpg 768w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/DSC_0094-1536x1152.jpg 1536w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/DSC_0094-2048x1536.jpg 2048w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/DSC_0094-960x720.jpg 960w\" sizes=\"auto, (max-width: 299px) 100vw, 299px\" \/><\/p>\n<p><strong>DPDS system for Lab. (prototype)\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 Programable RAS (P-RAS\u00ae \u03b2)<\/strong><\/p>\n<div style=\"width: 625px;\" class=\"wp-video\"><video class=\"wp-video-shortcode\" id=\"video-243-1\" width=\"625\" height=\"352\" preload=\"metadata\" controls=\"controls\"><source type=\"video\/mp4\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/CAOmovie.mp4?_=1\" \/><a href=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/CAOmovie.mp4\">https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2024\/04\/CAOmovie.mp4<\/a><\/video><\/div>\n<p><strong>Demonstration of DPDS of CuAlO2, P-RAS\u00ae \u03b2<\/strong><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-970 aligncenter\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2018\/11\/DBR_RAS-300x300.jpg\" alt=\"\" width=\"216\" height=\"216\" srcset=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2018\/11\/DBR_RAS-300x300.jpg 300w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2018\/11\/DBR_RAS-150x150.jpg 150w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2018\/11\/DBR_RAS.jpg 540w\" sizes=\"auto, (max-width: 216px) 100vw, 216px\" \/><\/p>\n<p><strong><span style=\"float: none; background-color: #ffffff; color: #191e23; cursor: text; font-family: 'Noto Serif JP'; font-size: 16px; font-style: normal; font-variant: normal; letter-spacing: normal; orphans: 2; text-align: left; text-decoration: none; text-indent: 0px; text-transform: none; -webkit-text-stroke-width: 0px; white-space: normal; word-spacing: 0px; display: inline !important;\">Si\/SiO2 Vertical DBR with Er-Y silicate active layer prepared by P-RAS\u00ae \u03b2<\/span><\/strong><br \/><span style=\"display: inline !important; float: none; background-color: #ffffff; color: #191e23; cursor: text; font-family: 'Noto Serif JP'; font-size: 16px; font-style: normal; font-variant: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-decoration: none; text-indent: 0px; text-transform: none; -webkit-text-stroke-width: 0px; white-space: normal; word-spacing: 0px;\">(P-RAS\u00ae has been registered by Shincron)<\/span><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-1402 aligncenter\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2020\/10\/p-ras.jpg\" alt=\"\" width=\"346\" height=\"318\" \/><\/p>\n<p>\u00a0 \u00a0 \u00a0 <a href=\"https:\/\/www.shincron.co.jp\/product\/model\/p-ras\/\">Programmable RAS (P-RAS\u00ae) Powered by SHINCRON Co. Ltd.<\/a><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-334\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/IMG_2325-e1492501051720-300x300.jpg\" alt=\"\" width=\"250\" height=\"300\" \/><span style=\"display: inline !important; float: none; background-color: #ffffff; color: #191e23; cursor: text; font-family: 'Noto Serif JP'; font-size: 16px; font-style: normal; font-variant: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-decoration: none; text-indent: 0px; text-transform: none; -webkit-text-stroke-width: 0px; white-space: normal; word-spacing: 0px;\"> \u00a0<\/span><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-883\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2018\/08\/IMG_20180825_094722-300x225.jpg\" alt=\"\" width=\"300\" height=\"225\" srcset=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2018\/08\/IMG_20180825_094722-300x225.jpg 300w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2018\/08\/IMG_20180825_094722-768x576.jpg 768w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2018\/08\/IMG_20180825_094722-1024x768.jpg 1024w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2018\/08\/IMG_20180825_094722-960x720.jpg 960w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><br \/><a href=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/VID_20111107_174331.3gp\">RAS for Lab.\u00a0\u03b1 (Video)<\/a><span style=\"display: inline !important; float: none; background-color: #ffffff; color: #191e23; cursor: text; font-family: 'Noto Serif JP'; font-size: 16px; font-style: normal; font-variant: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-decoration: none; text-indent: 0px; text-transform: none; -webkit-text-stroke-width: 0px; white-space: normal; word-spacing: 0px;\"> \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 <\/span>\u00a0 <a href=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2018\/08\/VID_20180825_111544.mp4\">DPDS system\u00a0 \"Programmable RAS \u03b1\" <\/a><\/p>\n<p><strong>Microwave Plasma(MP) CVD systems <\/strong><span style=\"display: inline !important; float: none; background-color: #ffffff; color: #191e23; cursor: text; font-family: 'Noto Serif JP'; font-size: 16px; font-style: normal; font-variant: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-decoration: none; text-indent: 0px; text-transform: none; -webkit-text-stroke-width: 0px; white-space: normal; word-spacing: 0px;\">(for Diamond growth)\u3000<\/span><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-321\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-18-14-15-33-e1492500017707-300x300.jpg\" alt=\"\" width=\"222\" height=\"222\" srcset=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-18-14-15-33-e1492500017707-300x300.jpg 300w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-18-14-15-33-e1492500017707-150x150.jpg 150w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-18-14-15-33-e1492500017707-768x768.jpg 768w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-18-14-15-33-e1492500017707-1024x1024.jpg 1024w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-18-14-15-33-e1492500017707-960x960.jpg 960w\" sizes=\"auto, (max-width: 222px) 100vw, 222px\" \/><span style=\"display: inline !important; float: none; background-color: #ffffff; color: #191e23; cursor: text; font-family: 'Noto Serif JP'; font-size: 16px; font-style: normal; font-variant: normal; font-weight: 400; letter-spacing: normal; orphans: 2; text-align: left; text-decoration: none; text-indent: 0px; text-transform: none; -webkit-text-stroke-width: 0px; white-space: normal; word-spacing: 0px;\"> \u00a0 \u00a0 \u00a0 <\/span><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-365\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/diamondR-300x227.jpeg\" alt=\"\" width=\"278\" height=\"210\" srcset=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/diamondR-300x227.jpeg 300w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/diamondR-768x580.jpeg 768w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/diamondR.jpeg 883w\" sizes=\"auto, (max-width: 278px) 100vw, 278px\" \/><\/p>\n<p><strong>Pulsed-Laser Deposition<\/strong> (PLD for Layered\u00a0 metal oxide compounds) <img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-325\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-18-14-18-31-e1492500090719-300x300.jpg\" alt=\"\" width=\"222\" height=\"222\" srcset=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-18-14-18-31-e1492500090719-300x300.jpg 300w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-18-14-18-31-e1492500090719-150x150.jpg 150w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-18-14-18-31-e1492500090719-768x768.jpg 768w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-18-14-18-31-e1492500090719-1024x1024.jpg 1024w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-18-14-18-31-e1492500090719-960x960.jpg 960w\" sizes=\"auto, (max-width: 222px) 100vw, 222px\" \/><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-606\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/11\/c7805photo-300x151.jpg\" alt=\"\" width=\"368\" height=\"185\" srcset=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/11\/c7805photo-300x151.jpg 300w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/11\/c7805photo.jpg 567w\" sizes=\"auto, (max-width: 368px) 100vw, 368px\" \/><\/p>\n<p><strong>UV&amp;EB Lithography systems<\/strong> (SVBL Clean room)<\/p>\n<p><strong>ICP-RIE<\/strong> (NE-500:ULVAC) (SVBL Clean room)<br \/><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-295\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/0483-1-300x174.jpg\" alt=\"\" width=\"300\" height=\"174\" srcset=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/0483-1-300x174.jpg 300w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/0483-1.jpg 579w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/> <img loading=\"lazy\" decoding=\"async\" class=\"wp-image-349 alignnone\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/pcwg-300x257.png\" alt=\"\" width=\"205\" height=\"176\" srcset=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/pcwg-300x257.png 300w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/pcwg.png 552w\" sizes=\"auto, (max-width: 205px) 100vw, 205px\" \/><\/p>\n<p><strong>Ion Implantation<\/strong> (200kV: Nisshin HighVol.) (SVBL Clean room)<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-311\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-14-14-04-21-e1492500238286-300x225.jpg\" alt=\"\" width=\"300\" height=\"225\" srcset=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-14-14-04-21-e1492500238286-300x225.jpg 300w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-14-14-04-21-e1492500238286-768x576.jpg 768w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-14-14-04-21-e1492500238286-1024x768.jpg 1024w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/04\/-2017-04-14-14-04-21-e1492500238286-960x720.jpg 960w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><\/p>\n<p><strong>MP-Chemical Vapor Synthesis<\/strong> (for Fluoresent Nano-crystal diamond (NCD))\u00a0 \u00a0 (Under development supported by Strawb)<\/p>\n<p><strong>PL measurement systems<\/strong> (Conventional, Gated-Photon-Counting, Micro- &amp; HBT)<\/p>\n<p><strong>Waveguide measurement setup<\/strong><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-631\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/11\/wgsetup-226x300.jpg\" alt=\"\" width=\"226\" height=\"300\" srcset=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/11\/wgsetup-226x300.jpg 226w, https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/11\/wgsetup.jpg 355w\" sizes=\"auto, (max-width: 226px) 100vw, 226px\" \/> \u00a0 \u00a0<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-632\" src=\"https:\/\/www.flex.es.uec.ac.jp\/wp-content\/uploads\/2017\/11\/glight-e1511073075202.jpg\" alt=\"\" width=\"266\" height=\"192\" \/><br \/>(Visualization of Guided IR-light by up-conversion)<\/p>\n<p><strong>TEOS-RF-PCVD<\/strong> (Handmade for SiOx thin film)<\/p>\n<p><strong>and.. Our Brains &amp; Skill<\/strong><\/p>\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Equipment Digitally Processed DC Sputtering (DPDS) developments (supported by Plus-Watch &amp; Shincron) \u00a0 \u00a0 \u00a0 <a href=\"https:\/\/www.flex.es.uec.ac.jp\/?page_id=243\" class=\"more-link\">...<span class=\"screen-reader-text\"> \"Equipment\"<\/span> \u3092\u7d9a\u3051\u3066\u8aad\u3080<\/a><\/p>\n","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-243","page","type-page","status-publish","h-entry","hentry","h-as-page"],"_links":{"self":[{"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=\/wp\/v2\/pages\/243","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=243"}],"version-history":[{"count":74,"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=\/wp\/v2\/pages\/243\/revisions"}],"predecessor-version":[{"id":1644,"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=\/wp\/v2\/pages\/243\/revisions\/1644"}],"wp:attachment":[{"href":"https:\/\/www.flex.es.uec.ac.jp\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=243"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}